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Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.

By: Stuart, R. V.
Material type: materialTypeLabelBookPublisher: New York : Academic Press, 1983ISBN: 0126747806.Subject(s): Vacuum technology | Thin films | Cathode sputtering (Plating process)DDC classification: 621.5/5
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Includes index.

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