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Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.

By:

Stuart, R. V

Material type:

TextPublication details: New York : Academic Press, 1983.ISBN:

0126747806

Subject(s):

DDC classification:

621.5/5 19

LOC classification:

TP156.V3 S78 1983

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Includes index.

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